Abstract

Thin films of fullerene (C60) is of about 200 nm thicknesses has been deposited by thermal evaporation method on glass substrate at both 303 and 403 K substrate temperature (Ts= 303 and 403 K) and under pressure is about 10-5 mbar. This study has been concentrated on the effect of substrate temperature on some physical properties of C60 thin films such as morphology and structural properties. X-ray diffraction analysis (XRD) showed that films which were deposited at 303 and at 403 K on soda lime glass substrates possess amorphous structure. Grain size increased from 13 nm for films deposited at 303 K to 22.5 nm for the films deposited at 403 K. Scanning electron microscope (SEM) and atomic force spectroscope (AFM) demonstrate decreasing in C60 roughness as substrate temperature increased